TY  - RPRT
TI  - High rate reactive sputtering of MoN(x) coatings
AU  - Rudnik, Paul J.
AU  - Graham, Michael E.
AU  - Sproul, William D.
PY  - 1991
UR  - https://ntrs.nasa.gov/citations/19950047708
ID  - 19950047708
ER  -