@misc{indiciae41b7cbbab16a, title = {Study of InGaAs-based modulation doped field effect transistor structures using variable-angle spectroscopic ellipsometry}, author = {Alterovitz, S. A. and Sieg, R. M. and Yao, H. D. and Snyder, P. G. and Woollam, J. A. and Pamulapati, J. and Bhattacharya, P. K. and Sekula-Moise, P. A.}, year = {1991}, url = {https://ntrs.nasa.gov/citations/19950047806}, note = {Source identifier: 19950047806} }