@misc{indiciaea63bf44259c0, title = {Smart materials fabrication and materials for micro-electro-mechanical systems; Symposium Proceedings, San Francisco, CA, Apr. 28-30, 1992}, author = {Jardine, A. Peter and Johnson, George C. and Crowson, Andrew and Allen, Mark}, year = {1992}, url = {https://ntrs.nasa.gov/citations/19950048381}, note = {Source identifier: 19950048381} }