TY - RPRT TI - Smart materials fabrication and materials for micro-electro-mechanical systems; Symposium Proceedings, San Francisco, CA, Apr. 28-30, 1992 AU - Jardine, A. Peter AU - Johnson, George C. AU - Crowson, Andrew AU - Allen, Mark PY - 1992 UR - https://ntrs.nasa.gov/citations/19950048381 ID - 19950048381 ER -