@misc{indiciae39bfaefc2122,
  title = {Fabrication of silicon-based shape memory alloy micro-actuators},
  author = {Johnson, A. David and Busch, John D. and Ray, Curtis A. and Sloan, Charles L.},
  year = {1992},
  url = {https://ntrs.nasa.gov/citations/19950048399},
  note = {Source identifier: 19950048399}
}