TY  - RPRT
TI  - Fabrication of silicon-based shape memory alloy micro-actuators
AU  - Johnson, A. David
AU  - Busch, John D.
AU  - Ray, Curtis A.
AU  - Sloan, Charles L.
PY  - 1992
UR  - https://ntrs.nasa.gov/citations/19950048399
ID  - 19950048399
ER  -