@misc{indiciae04fedd4cdc49,
  title = {Safety-Enclosure System For MOCVD Process Chamber},
  author = {Singletery, James, Jr. and Velasquez, Hugo and Warner, Joseph},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19950065202},
  note = {Source identifier: 19950065202}
}