@misc{indiciaeb552a6612918,
  title = {Small-Modulation Ellipsometer},
  author = {Woollam, J. and Johs, B. and Ducharme, S. and Machlab, H.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19950065252},
  note = {Source identifier: 19950065252}
}