@misc{indiciaee636b89f92fb,
  title = {Characterizing SOI Wafers By Use Of AOTF-PHI},
  author = {Cheng, Li-Jen and Li, Guann-Pyng and Zang, Deyu},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19950065423},
  note = {Source identifier: 19950065423}
}