TY  - RPRT
TI  - Characterizing SOI Wafers By Use Of AOTF-PHI
AU  - Cheng, Li-Jen
AU  - Li, Guann-Pyng
AU  - Zang, Deyu
PY  - 1995
UR  - https://ntrs.nasa.gov/citations/19950065423
ID  - 19950065423
ER  -