TY  - RPRT
TI  - Waveguide-coupled resonator filters on AlN on silicon
AU  - Liaw, H. M.
AU  - Cameron, T. P.
AU  - Hunt, W. D.
AU  - Hickernell, F. S.
PY  - 1994
UR  - https://ntrs.nasa.gov/citations/19960027052
ID  - 19960027052
ER  -