@misc{indiciae3d805a0de730,
  title = {MEMS in Space Systems},
  author = {Lyke, J. C. and Michalicek, M. A. and Singaraju, B. K.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19960054104},
  note = {Source identifier: 19960054104}
}