@misc{indiciae7cd2203bea97,
  title = {Silicon Micromachined Sensor for Broadband Vibration Analysis},
  author = {Gutierrez, Adolfo and Edmans, Daniel and Cormeau, Chris and Seidler, Gernot and Deangelis, Dave and Maby, Edward},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19960054122},
  note = {Source identifier: 19960054122}
}