@misc{indiciae6375463e0f06, title = {Recent Developments in Microsystems Fabricated by the Liga-Technique}, author = {Schulz, J. and Bade, K. and El-Kholi, A. and Hein, H. and Mohr, J.}, year = {1995}, url = {https://ntrs.nasa.gov/citations/19960054128}, note = {Source identifier: 19960054128} }