@misc{indiciae9e6970bce230,
  title = {Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program},
  author = {Koester, D. A. and Markus, K. W. and Dhuler, V. and Mahadevan, R. and Cowen, A.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19960054130},
  note = {Source identifier: 19960054130}
}