TY  - RPRT
TI  - Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program
AU  - Koester, D. A.
AU  - Markus, K. W.
AU  - Dhuler, V.
AU  - Mahadevan, R.
AU  - Cowen, A.
PY  - 1995
UR  - https://ntrs.nasa.gov/citations/19960054130
ID  - 19960054130
ER  -