@misc{indiciaee422131be987,
  title = {MEMS Technology for Space Applications},
  author = {vandenBerg, A. and Spiering, V. L. and Lammerink, T. S. J. and Elwenspoek, M. and Bergveld, P.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/19960054140},
  note = {Source identifier: 19960054140}
}