@misc{indiciae5852c706422d,
  title = {Pressure Effect in ZnO Films Using Off-Axis Sputtering Deposition},
  author = {Zhu, Shen and Su, C.-H. and Lehoczky, S. L. and Peters, P. and George, M. A.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/19990108598},
  note = {Source identifier: 19990108598}
}