@misc{indiciaefe5021b66305,
  title = {Development of Numerical Extended Hydrodynamics for Transition-Regime Non-Equilibrium Flows Encountered in Semiconductor Manufacturing Processes},
  author = {Groth, Clinton P. T. and Roe, Philip L.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/19990109994},
  note = {Source identifier: 19990109994}
}