TY  - RPRT
TI  - Development of Numerical Extended Hydrodynamics for Transition-Regime Non-Equilibrium Flows Encountered in Semiconductor Manufacturing Processes
AU  - Groth, Clinton P. T.
AU  - Roe, Philip L.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/19990109994
ID  - 19990109994
ER  -