@misc{indiciaee368ceb55689,
  title = {Process-Induced Morphological Defects in Epitaxial CVD Silicon Carbide},
  author = {Powell, J. A. and Larkin, D. J.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20000033694},
  note = {Source identifier: 20000033694}
}