@misc{indiciaeb62d323153b5, title = {Method of Forming Micro-Sensor Thin-Film Anemometer}, author = {Sheplak, Mark and McGinley, Catherine B. and Spina, Eric F. and Stephens, Ralph M. and Hopson, Purnell, Jr. and Cruz, Vincent B.}, year = {2000}, url = {https://ntrs.nasa.gov/citations/20000048258}, note = {Source identifier: 20000048258} }