@misc{indiciae120001a5373c,
  title = {3D MEMS in Standard Processes: Fabrication, Quality Assurance, and Novel Measurement Microstructures},
  author = {Lin, Gisela and Lawton, Russell A.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20000056607},
  note = {Source identifier: 20000056607}
}