TY  - RPRT
TI  - 3D MEMS in Standard Processes: Fabrication, Quality Assurance, and Novel Measurement Microstructures
AU  - Lin, Gisela
AU  - Lawton, Russell A.
PY  - 2000
UR  - https://ntrs.nasa.gov/citations/20000056607
ID  - 20000056607
ER  -