@misc{indiciae950f0face767,
  title = {Finite-Element Modeling of 3C-SiC Membranes},
  author = {DeAnna, R. G. and Mitchell, J. and Zorman, C. A. and Mehregany, M.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20000057043},
  note = {Source identifier: 20000057043}
}