@misc{indiciae0a1eb185472f, title = {A Semianalytical Ion Current Model for Radio Frequency Driven Collisionless Sheaths}, author = {Bose, Deepak and Govindan, T. R. and Meyyappan, M. and Arnold, Jim}, year = {2001}, url = {https://ntrs.nasa.gov/citations/20010046070}, note = {Source identifier: 20010046070} }