TY  - RPRT
TI  - A Semianalytical Ion Current Model for Radio Frequency Driven Collisionless Sheaths
AU  - Bose, Deepak
AU  - Govindan, T. R.
AU  - Meyyappan, M.
AU  - Arnold, Jim
PY  - 2001
UR  - https://ntrs.nasa.gov/citations/20010046070
ID  - 20010046070
ER  -