@misc{indiciae2467bb9acdd5,
  title = {A Self-Consistent Plasma-Sheath Model for the Inductively Coupled Plasma Reactor},
  author = {Bose, Deepak and Govindam, T. R. and Meyyappan, M.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20010084622},
  note = {Source identifier: 20010084622}
}