TY  - RPRT
TI  - A Self-Consistent Plasma-Sheath Model for the Inductively Coupled Plasma Reactor
AU  - Bose, Deepak
AU  - Govindam, T. R.
AU  - Meyyappan, M.
PY  - 2000
UR  - https://ntrs.nasa.gov/citations/20010084622
ID  - 20010084622
ER  -