@misc{indiciaec70d8719cbe9, title = {A Coupled Plasma and Sheath Model for High Density Reactors}, author = {Deepak, Bose and Govindan, T. R. and Meyyappan, M. and Arnold, Jim}, year = {2001}, url = {https://ntrs.nasa.gov/citations/20010090349}, note = {Source identifier: 20010090349} }