@misc{indiciae1a4b3a27079c, title = {Characterization of Showerhead Performance At Low Pressure}, author = {Hash, David B. and Mihopoulos, Ted and Meyyappan, Meyya and Coronell, Dan and Carroll, Carol W.}, year = {1999}, url = {https://ntrs.nasa.gov/citations/20020039692}, note = {Source identifier: 20020039692} }