TY  - RPRT
TI  - Characterization of Showerhead Performance At Low Pressure
AU  - Hash, David B.
AU  - Mihopoulos, Ted
AU  - Meyyappan, Meyya
AU  - Coronell, Dan
AU  - Carroll, Carol W.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20020039692
ID  - 20020039692
ER  -