@misc{indiciae4850dfc05fd9,
  title = {Feature Profile Evolution of SiO2 Trenches In Fluorocarbon Plasmas},
  author = {Hwang, Helen and Govindan, T. R. and Meyyappan, M. and Arunachalam, Valli and Rauf, Shahid and Coronell, Dan and Carroll, Carol W.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20020039739},
  note = {Source identifier: 20020039739}
}