@misc{indiciae658f1f7a8bbf,
  title = {Computational Modeling in Plasma Processing for 300 mm Wafers},
  author = {Meyyappan, Meyya and Arnold, James O.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20020039860},
  note = {Source identifier: 20020039860}
}