@misc{indiciaecfa2cd3ab18f,
  title = {Computational Modeling as a Design Tool in Microelectronics Manufacturing},
  author = {Meyyappan, Meyya and Arnold, James O.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20020049428},
  note = {Source identifier: 20020049428}
}