@misc{indiciae1a9f1ad98780,
  title = {Etch Profile Simulation Using Level Set Methods},
  author = {Hwang, Helen H. and Meyyappan, Meyya and Arnold, James O.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20020049815},
  note = {Source identifier: 20020049815}
}