@misc{indiciaeea333f23651f,
  title = {Reactive Ion Etching in a VHF Parallel Plate Reactor},
  author = {Dahi, H. and Murnick, D. E. and Meyyappan, Meyya and Arnold, James O.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20020050916},
  note = {Source identifier: 20020050916}
}