TY  - RPRT
TI  - Reactive Ion Etching in a VHF Parallel Plate Reactor
AU  - Dahi, H.
AU  - Murnick, D. E.
AU  - Meyyappan, Meyya
AU  - Arnold, James O.
PY  - 1997
UR  - https://ntrs.nasa.gov/citations/20020050916
ID  - 20020050916
ER  -