@misc{indiciae2a35cdc4dd70,
  title = {Profile Evolution Simulation in Etching Systems Using Level Set Methods},
  author = {Hwang, Helen H. and Govindan, T. R. and Meyyappan, M.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20020051994},
  note = {Source identifier: 20020051994}
}