TY  - RPRT
TI  - Profile Evolution Simulation in Etching Systems Using Level Set Methods
AU  - Hwang, Helen H.
AU  - Govindan, T. R.
AU  - Meyyappan, M.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/20020051994
ID  - 20020051994
ER  -