@misc{indiciae638c8ae0c761,
  title = {A Computational Chemistry Database for Semiconductor Processing},
  author = {Jaffe, R. and Meyyappan, M. and Arnold, J. O.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20020061377},
  note = {Source identifier: 20020061377}
}