@misc{indiciaed5862e8344d4, title = {Folded Coplanar Waveguide Slot Antenna on Silicon Substrates With a Polyimide Interface Layer}, author = {Bacon, Andrew and Ponchak, George E. and Papapolymerou, John and Bushyager, Nathan and Tentzeris, Manos and Williams, W. D.}, year = {2002}, url = {https://ntrs.nasa.gov/citations/20020073077}, note = {Source identifier: 20020073077} }