@misc{indiciae36c3e1e3f13b,
  title = {Carbon Nanotube Based Nano-Electro-Mechanical Systems (NEMS)},
  author = {Han, Jie and Dai, Hongjie and Saini, Subhash},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20020073522},
  note = {Source identifier: 20020073522}
}