@misc{indiciae8e3a30f56036,
  title = {Simulation of Etching in Chlorine Discharges Using an Integrated Feature Evolution-Plasma Model},
  author = {Hwang, Helen H. and Bose, Deepak and Govindan, T. R. and Meyyappan, M. and Biegel, Bryan},
  year = {2002},
  url = {https://ntrs.nasa.gov/citations/20020091861},
  note = {Source identifier: 20020091861}
}