TY  - RPRT
TI  - Simulation of Etching in Chlorine Discharges Using an Integrated Feature Evolution-Plasma Model
AU  - Hwang, Helen H.
AU  - Bose, Deepak
AU  - Govindan, T. R.
AU  - Meyyappan, M.
AU  - Biegel, Bryan
PY  - 2002
UR  - https://ntrs.nasa.gov/citations/20020091861
ID  - 20020091861
ER  -