@misc{indiciae08fbc3b2bc0f,
  title = {A Step Made Toward Designing Microelectromechanical System (MEMS) Structures With High Reliability},
  author = {Nemeth, Noel N.},
  year = {2003},
  url = {https://ntrs.nasa.gov/citations/20050214854},
  note = {Source identifier: 20050214854}
}