TY  - RPRT
TI  - A CMOS-compatible process technique for fabricating laterally embedded multi-nanaochannels without sacrificial etching
AU  - Yang, E.
AU  - Lee, C.
AU  - Myung, N.
AU  - George, T.
PY  - 2003
UR  - https://ntrs.nasa.gov/citations/20060030484
ID  - 20060030484
ER  -