@misc{indiciae4b43f1d80610,
  title = {High performance MEMS micro-gyroscope},
  author = {Bae, S. Y. and Hayworth, K. J. and Yee, K. Y. and Shcheglov, K. and Challoner, A. D. and Wiberg, D. V.},
  year = {2002},
  url = {https://ntrs.nasa.gov/citations/20060030678},
  note = {Source identifier: 20060030678}
}