@misc{indiciae988acf60dfbe, title = {Minimum dimension dimple analysis. MEMS Reliability Alliance Technical Report 36-02}, author = {Lin, G. and Lawton, R. and Wellman, J. and Phinney, L.}, year = {2000}, url = {https://ntrs.nasa.gov/citations/20060031060}, note = {Source identifier: 20060031060} }