@misc{indiciaebc9408355681,
  title = {Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01},
  author = {Lawton, R. and Lin, G. and Wellman, J.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060031061},
  note = {Source identifier: 20060031061}
}